How does ion milling work?

How does ion milling work? The ion milling systems manufactured by Hitachi High-Tech apply a broad low-energy Ar+ ion beam to sputter sample material. Cryogenic ion milling (https://www.stinstruments.com/energy/cryogenic-ion-milling-of-a-fuel-cell-membrane-electrode-assembly-mea/) is even possible for heat sensitive samples to reduce damage by beam irradiation. Read more »

Why use ion milling? Conventional grinding and polishing techniques often generate flaws and artifacts such distorted structures, superficial scratching or smearing. Cross sections prepared by cleaving or mechanical methods often induce damage and result in distorted internal structures.Conventional grinding and polishing techniques often generate flaws and artifacts such distorted structures, superficial scratching or smearing. Cross sections prepared by cleaving or mechanical methods often induce damage and result in distorted internal structures. Read more »

Applications of ion milling

Applications of ion milling Relief ion milling VS. flat ion milling Because of the Gaussian-shaped argon beam, it is possible to emphasize topographical information of composite materials (relief ion milling) or to reduce surface topography for enhanced crystal orientation visualization (flat ion milling) by adjusting the beam irradiation angle.

Ion Milling – ArBlade 5000

Sample preparation is often required before scanning electron microscope measurements can be performed. Cutting and polishing are common preparation techniques to remove surface roughness and to obtain a flat surface. Such traditional mechanical techniques apply shear forces to the sample, which result in surface artifacts like scratches, smearing, delamination and other damages at soft materials. All these issues are circumvented with the latest ion milling techniques developed by Hitachi High-Tech. These systems apply a broad low-energy Ar⁺ ion beam to sputter sample material from the sample and can be used both as cross section polisher and surface polisher. No mechanical stress is applied, which leaves extremely flat surfaces and cross sections without any artifacts.

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Key Features and Benefits

♦ Dual milling configuration in a single instrument

♦ Cross-section milling rate of 1 mm/hour

♦ Cross-section widths up to 8 mm

Applications

♦ Polymers

♦ Metallurgy

♦ Microelectronics

About Hitachi

Hitachi High-Tech Corporation, provides a wide variety of scientific instruments. Their innovative R&D approach enables them to provide world-class solutions in the fields of materials sciences, life sciences, energy storage and semiconductor.